应用文章
In this study, qualitative stereo imaging was demonstrated on the Keysight Technologies, Inc. 8500 compact ield emission scanning electron microscope by using three different methods based on stereo-pair technique: “lateral shifting”, “individual MCP imaging”, and “sample tilting”. The qualitative imaging creates 3D looking micrographs revealing objects at different levels. In the following, a simpliied geometric deinition was discussed for quantitative measurement and examples were given by measuring three dimensions on stereo pairs. This quantitative measurement is of importance for investigations of objects with 3D topographic features, especially for uncovering the “hidden” third dimension.
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