Mechanical Properties of Multi-layer Film Stacks
应用文章
In this work, we measure the mechanical properties of 50nm films with remarkable precision and accuracy. The precision is due to Express Test, which performs indentations at a rate of one per second, thereby allowing many indentations to be included in the final determination of modulus and hardness. The accuracy is due, in part, to an analytic model which yields the substrate-independent moduli of thin films. In order to apply the thin-film model to a stack of multiple films, the film modulus of each new layer is determined and then used as the “substrate” modulus for the next layer. This process could be repeated ad infinitum. The thin-film model reveals a large difference in Young’s modulus between two 50nm films.
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