应用文章
Various electrical atomic force microscopy (AFM) techniques are available that are capable of sensing the nanoscale electrical properties of samples ranging from 2D materials over silicon to those of biophysical interest. Electrical AFM modes can be distinguished by current/impedance sensing and force sensing techniques as shown in Figure 1, with each technique having their own advantage and operating frequency. Force sensing techniques (lower part in Figure 1) that rely on the optical readout of the cantilever deflection, like EFM (electrostatic force microscopy) and KFM (Kelvin force microscopy), are typically limited to the characterization of static or low frequency electric properties and quasi-static dielectric properties of up to 100 kHz. Current and impedance sensing techniques (upper part in Figure 1) where the electrical signal of the AFM cantilever is read out with an external electronic circuitry, for instance SMM (scanning microwave microscopy), can work from 1 to 20 GHz.
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