Characterizing MEMS Optical Scanners Using LCR Meters
应用文章
Introduction
This application brief describes how the Keysight Technologies, Inc. E4980A can greatly improve the test efficiency of electromagnetic MEMS optical scanners.
E4980A Precision LCR Meter
The Keysight E4980A Precision LCR Meter, with exceptional accuracy and speed, is the ideal tool for research and development, as well as manufacturing test.
Electromagnetic MEMS Optical Scanners
For MEMS optical scanners, the electromagnetic actuator is often used as the actuator to move the mirrors of optical scanners. By putting magnets around the movable part on which the coil has been fabricated and applying current to the coil, the Lorentz force moves the object (Figure 2). In many cases, the movable part is resonated by applied AC current.