On-Wafer Test of Power Devices

Reduce your development time for power devices with on-wafer test

On-wafer test of your power devices can increase your rate of product introduction to meet the needs of your customers. The growth in the use of power semiconductors has exploded due to emerging energy standards and the need for efficient power utilization.

The double-digit growth in the market for power devices now exceeds the rest of the semiconductor market. To achieve the cycle times demanded by customers, manufacturers have to migrate to on-wafer test of their power devices.

Conventionally, manufacturers characterize their power semiconductors after the devices have been diced and packaged. The delays incurred in this approach add cost and time to the development process. With the increased demand for power devices this approach is no longer viable. With on-wafer test you can speed your turnaround in the design, development and characterization of your new power devices.

FormFactor’s Tesla series on-wafer power device characterization system is a complete on-wafer test solution. The Tesla system is designed to provide probing levels of up to 3,000 V, 100 A and 100 W/cm2.

It features an advanced chuck mechanism to ensure low contact resistance, facilitate thin wafer handling and power dissipation while providing a low-noise, fully guarded and shielded test environment. To ensure operator safety while handling high power devices the system incorporates a light curtain and safety interlock system. The system supports a measurement temperature range of -60 °C to 300 °C.

Tesla uses the Keysight B1505A power device analyzer/curve tracer to make the necessary measurements. This single box solution allows accurate measurement and curve tracing for the key parameters of interest when characterizing a power semiconductor device including breakdown voltage measurement and Rds(on) measurement.

- On-wafer test of power devices

- Reduce the development time fo power devices

- Supports probing at up to 3,000 V 100 A and 100 W/cm2

- Light curtain and system interlocks for operator safety

- Advanced chuck mechanism for low contact resistance and low noise

- Uses Keysight B1505A power device analyzer/curve tracer

On-Wafer Test of Power Devices

The Keysight B1505A power device analyzer/curve tracer is a single box solution for characterizing high power devices from sub-picoamps up to 3000 volts and 40 amps These capabilities are ideal for new power devices using wide-band gap materials such as silicon carbide or gallium nitride. Its ten-slot modular construction allows you to configure the B1505A to meet your exact needs with SMUs available to support highcurrent and high-voltage modes.

Whenever making power measurements the test fixture is extremely important, both to ensure safety and to support the wide variety of power device package types. The Tesla system from FormFactor meets this need making it and the B1505A the perfect match for on-wafer test of your high power devices

The combination of the Keysight B1505A and FormFactor’s Tesla system provides the capabilities you need in a system designed specifically for power devices. With the Tesla system you can migrate your characterization from in-package to on-wafer test, optimize your development process and, as a result, reduce the product development time for your power devices