应用文章
Introduction
Constant advances in semiconductor device scale and integration are leading to rapid increases in the number of devices in a single semiconductor chip. Quick process flaw detection and improved yield for semiconductor chips are becoming more important than ever for semiconductor device manufacturers. In process integration and process monitoring, more evaluation items using various test structures are required. The parametric test plays a crucial role in evaluating those increased test items. High throughput for evaluating the huge number of test items is strongly required. Keysight Technologies, Inc. has been offering parametric test systems in three generations – the HP4062 series and the Keysight 4070 and 4080 series. These series have been recognized as de-facto standard parametric test systems and widely used by most semiconductor manufacturers around the world.
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